How can the design be further optimized to handle constant magnification (4.5x) and field spot size ( < 2um) for tilted and non-tilted object configurations in a single design? Attached is a MWE. The system is not optimized for diffraction limit because of the acute surface bends in the front end optics thus resulting in larger SPHA through the propogation path.
- The optics are restricted to mechanical layout as shown below.
- How to define spot radius merit for each field individually in MFE?