Balancing diffraction limit performance and magnification in the system

  • 23 May 2021
  • 1 reply

Userlevel 1

How can the design be further optimized to handle constant magnification (4.5x) and field spot size ( < 2um) for tilted and non-tilted object configurations in a single design? Attached is a MWE. The system is not optimized for diffraction limit because of the acute surface bends in the front end optics thus resulting in larger SPHA through the propogation path.

- The optics are restricted to mechanical layout as shown below.

- How to define spot radius merit for each field individually in MFE?

1 reply

Userlevel 6
Badge +2


I think you will find some interesting tools in that learning path:

Let us know if you need further help.