I am trying to find the best way to compare results for my system tolerances and I would like to find a good estimation of my focused spot size and coordinates changes.
I would like to understand why there is a difference between the RSRE merit function value and the spot diagram value of the RMS spot radius if I am using the following :
Spot diagram : use 200 rays along the width and height in the spot diagram (rectangular pattern).
RSRE : have 100 rays for 1 pupil quadrant which means 200 rays along the pupil width (rectangular pattern).
The RMS spot radius is :
Spot diagram | RSRE |
1.68739222E-02 um | 1.693374956387612E-005 mm = 1.693e-2 um |
Thank you for your help