Hello everyone,
I was wondering if there is a way to optimize for an equal spot size over the full field of view. Mostly, after optimization, the spotsize is bigger to the edge of the field of view. Is there a way to give up some resolution in the center of the field of view to get an equal spot size over the whole field of view.
For example, my spot size in the center is 100µm, halfway to the edge it is 150µm and at the edge it is 200µm. I want to optimize so it is 150µm at all three positions.
Best answer by David.Nguyen
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