When Source and detector’s position are fixed and mirror’s tilt/decenter are only changing, I want to know the spot size and centroid position for as each tilt(θx,θy,θz) & decenter(X,Y,Z) of mirror at Detector.
(I want FWHM spot size. But if it is impossible, RMS spot size is ok.)
How can I know it by using tolerancing? If it is impossible, how can I do?
Best answer by David.NguyenView original