Hello guys.
I’ve been working on a high NA objective for the semicon metrology. A catadioptric lens is recommended. See the layout below,
the EFFL calculated by ZEMAX is -4 mm. From what i can see, it’s an imaging system, the focal length should not be a minus value. Can anyone explain this?
and when I use the operand REAY to calculate the real ray coordinate at the image-1 surface, it went wrong. Is REAY not applicable in this kind of catadioptric lens?
Best answer by Andrey.Pravdivtsev
Hi,
You have an intermediate image plane so the sign was changed. Your system has positive power so don’t worry.
REAY should work good there. What message did you get?
Thanks, Andrey.
Opticstudio usermanual doesn’t have the convetion, maybe you can recommend a book which I can read.
2. As for the REAY operand, see the picture below
because of the catadioptric structure, rays reflect at the surf38 first and then pass through the surf38 , the REAY operand tells the refraction position only. How can it tell the reflection position also? Should a dummy surface be involved,I guess?
Hi,
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