Hi all,

Regarding the built-in grating object in sequential/non-sequential mode (especially in non-sequential mode): I know we can assign different diffraction efficiency (DE) values for different diffraction orders, but this DE is typically constant across all incident angles.

Is there a standard way to assign an efficiency profile that varies with incident angle without fully modeling the real grating structure (like with RCWA)?

For example, for the 1st diffraction order:

-10 deg incidence -> DE = 0.3

0 deg incidence -> DE = 0.1

+10 deg incidence -> DE = 0.2

I am looking for a behavioral model rather than a physical one to save simulation time. Would the best approach be writing a User Defined DLL, or is there a way to utilize a Table Coating to modulate the efficiency, or even other potential methods?

Thanks for any insights!

Best,

Kaden